Description
DESCRIPTION
The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization. Nominal values for height and pitch are given below. Actual values come with the test grating. Structure: Si wafer with grating in top surface Pattern type: 1-D array of triangular steps with precise linear and angular dimensions Edge angle:
approximately 70 degrees Edge Radius:
≤10nm Pattern Height:
1.8µm – non-calibrated, for information only Pitch: 3 ±0.01µm Chip size: 5 x 5 x 0.5mm Effective area: Central square of 3 x 3mm Note: Values for step heights are nominal; actual step height is given with the product and could be ±5%
CategoryVape, Vape
BrandNot provided
SKUPRD-99E5CEC0E089
Global identifierNot provided
Identifier typeNot provided
Manufacturer part numberNot provided
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